In situ thin-film texture determination
نویسندگان
چکیده
A kinematic theory of reflection high energy electron diffraction ~RHEED! is presented for textured polycrystalline thin films. RHEED patterns are calculated for arbitrary texture situations and for any general crystallographic orientation that may be encountered in thin-film growth. It is shown that the RHEED pattern can be used as a fast and convenient tool for in situ texture characterization. The approach also permits quantitative extraction of angular dispersion parameters which are useful for optimizing thin-film growth conditions. © 1999 American Institute of Physics. @S0021-8979~99!04904-X#
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